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AMAT

AMAT-200MM

AMAT-200MM
OEM P/N	MTT P/N	PARTS DESCRIPTION
0020-01021	MTT-A1021	QUARTZ PLATE
0020-01039	MTT-A1039	QUARTZ PLATE SUPPORT
0200-01509	MTT-A1509	INSERT RING NM 200MM NOTCH
0020-04095	MTT-A4095	LEXAN RING
0020-08042	MTT-A08042	BLOCK PLATE FOR BD
0020-09029	MTT-A0029	ANODIEZE AL COVER
0020-09055	MTT-A0955	SENSOR PLATE
0020-09933	MTT-A9933	GAS DISTRIBUTION PLATE
0020-10117	MTT-A0117	TEOS PERF PLATE 8" (200MM)
0020-10122	MTT-A0122	SHOWERHEAD
0020-10204	MTT-A0204	SUSCEPTOR PLATE 200MM
0020-10941	MTT-A0941	ISOLATOR, TEFLON RING
0020-19002	MTT-A19002	DOOR , SLIT VALVE
0020-20275	MTT-A0275	CLAMP RING 8"(200MM)
0020-20340	MTT-A20340	Slit valve door (Non-Coating)
0020-21463	MTT-A1463	BOWL SHIELD
0020-21464	MTT-A1464	BOWL SHIELD ALUMINUM
0020-21665	MTT-A1665	SHIELD AL/TI 8" WAFER
0020-23276	MTT-SA2276	COVER RING
0020-24531	MTT-SA2531	SHIELD ADAPTER
0020-24913	MTT-SA4913	8'' PEDESTAL


0020-25256	MTT-SA5256	PEDESTAL SHIELD


0020-27025	MTT-A7025	CLAMP RING 3 PADS
0020-27190	MTT-SA2190	UPPER SHIELD

0020-27702	MTT-A2702	AMT CLAMP RING 6 PADS
0020-28354	MTT-A2354	AMT CLAMP RING 7 PADS
0020-28907	MTT-A8907	ISOLATOR DC BIAS MODIFIED SHUTTER COMPATIBLE
0020-29000	MTT-A9000	UPPER SHIELD
0020-30086	MTT-A0086	PERF PLATE
0020-30108	MTT-A0108	SHIELD CLAMP ALUMINUM
0020-30111	MTT-A30111	BLOCK PLATE
0020-30190	MTT-A0190	TOP, ADAPTER
0020-30195	MTT-A0195	COVER TOP, METAL ETCH
0020-30314	MTT-A30314	LOWER ELECTRODE
0020-30347	MTT-A0347	ANODIZE AL CYUNDRICAL
0020-30407	MTT-A0407	PERF PLATE 8" (200MM)
0020-30446	MTT-A0446	BLOCKER PLATE
0020-30580	MTT-A0580	BLOCK PLATE
0020-30797	MTT-A0797	PERF PLATE 8" (200MM), NITRIDE
0020-30816	MTT-A0816	GAS DISTRIBUTION PLATE 13 HOLES
0020-30919	MTT-A0919	SUSCEPTOR PLATE 200MM
0020-31088	MTT-A1088	SUSCEPTOR PLATE 200MM
0020-31488	MTT-A1488	GAS DISTRIBUTION PLATE , 13 HOLES, ANODIZED
0020-31490	MTT-A1490	GAS DISTRIBUTION PLATE , 37 HOLES, ANODIZED
0020-31492	MTT-A1492	GAS DISTRIBUTION PLATE , 101 HOLES, ANODIZED
0020-31493	MTT-A1493	GAS DISTRIBUTION PLATE , 133 HOLES, ANODIZED
0020-31547	MTT-A1547	GAS DISTRIBUTION PLATE 101 HOLES
0020-31548	MTT-A1548	GAS DISTRIBUTION PLATE 133 HOLES
0020-31620	MTT-A1620	SUSCEPTOR PLATE 200MM
0020-31658	MTT-A1658	RING
0020-31789	MTT-A1789	COVER TOP, 2 MIL HARD ANODIZED
0020-31801	MTT-A31801	119H G.D.P
0020-31804	MTT-A1804	GAS DISTRIBUTION PLATE , 80 HOLES, ANODIZED


0020-32036	MTT-A2036	BLOCK PLATE 200MM
0020-32259	MTT-A2259	GAS DISTRIBUTION PLATE119 HOLES, OXALIC ANODIZED
0020-32260	MTT-A2260	GAS DISTRIBUTION PLATE, 37 HOLES
0020-32261	MTT-A2261	GAS DISTRIBUTION PLATE, 101 HOLES
0020-32262	MTT-A2262	GAS DISTRIBUTION PLATE , 133 HOLES, OXALIC ANODIZED
0020-32263	MTT-A2263	GAS DISTRIBUTION PLATE 145 HOLE
0020-32952	MTT-A2952	SUSCEPTOR PLATE 200MM

0020-33538	MTT-A33538	PERF PLATE
0020-34142	MTT-A4142	TOP COVER

0020-34297	MTT-A4297	CHAMBER LID
0020-34444	MTT-A4444	FACE PLATE 200MM
0020-34445	MTT-A34445	BLOCK PLATE 200MM
0020-34455	MTT-A4455	TOP, ADAPTER
0020-34470	MTT-A4470	TOP LID
0020-34475	MTT-A4475	BLOCKER



0020-34775	MTT-A34775	BLOCK PLATE for SILANE (BLOCK)
0020-42285	MTT-A2285	BLOCK PLATE FOR WXZ CHAMBER
0020-42287	MTT-A2287	SHOWERHEAD FOR WXZ CHAMBER
0020-42340	MTT-A2340	MW AL WINDOW (APERATURE PLATE)
0020-57985	MTT-A7985	SHIM, PROCESS KIT VESPEL
0020-58577	MTT-A8577	AKT LEXAN PICTURE FRAME
0021-00041	MTT-A00041	SHOWERHEAD, SILANE
0021-00042	MTT-A00042	SHOWERHEAD, TEOS

0021-01572	MTT-A1572	FACE PLATE 200MM
0021-01813	MTT-A01813	SHOWERHEAD
0021-02306	MTT-A2306	FACE PLATE 200MM, HTF

0021-03568	MTT-A03568	SHOWERHEAD

0021-06798	MTT-VA06798	AMT Insert Bottom Mixing
0021-09007	MTT-A9007	UNI. LID
0021-09008	MTT-A9008	UNI. LID
0021-09098	MTT-A9098	RING, SEPARATION, MXP-PLUS LINER
0021-09104	MTT-A9104	LINER,CATHODE

0021-09914	MTT-A09914	BLOCK PLATE
0021-15200	MTT-A15200	SHOWERHEAD
0021-21952	MTT-A21952	SHOWERHEAD
0021-24013	MTT-A24013	SHOWERHEAD
0021-34710	MTT-A34710	SHOWER HEAD

0021-35744	MTT-A5744	BLOCK PLATE
0021-35869	MTT-A5869	SHOWERHEAD
0021-36302	MTT-A36302	BLOCKER
0021-38119	MTT-A38119	PERF PLATE FOR DXZ CHAMBER
0021-39385	MTT-A39385	R2 CHAMBER LID
0021-54545	MTT-A54545	BLOCKER PLATE
0021-76025	MTT-A6025	DEPOSITION RING
0040-20561-PD	MTT-A0561-PD	BELL JAR, QUARTZ
0040-21178	MTT-A1178	BELL JAR, QUARTZ
0040-21985	MTT-A1985	ANTI-LIFT BRACKET
0040-33998	MTT-A33998	Chamber Liner
0040-49608	MTT-VA49608	AMT Insert Mixing Block
0200-00176	MTT-A0176	SHADOW RING, QUARTZ
0200-00177	MTT-A0177	SI COLLAR RING, SI
0200-00410	MTT-A00410	QZ GDP
0200-00410	MTT-AGE410	QZ GDP, GE 012
0200-01119	MTT-A1119	200mm QUARTZ RING
0200-01119-002	MTT-A1119-002	SHADOW RING, QUARTZ
0200-01239	MTT-A1239	INSERT RING
0200-01446	MTT-VA1446	200mm SILICON INSERT RING
0200-01612	MTT-A1612	INJECTOR GAS
0200-01820	MTT-A1820	200mm SILICON INSERT RING
0200-02384K	MTT-A2384K	INSERT RING, SILICON
0200-02542	MTT-A2542	RING INSULATOR STEPPED PRODUCER ETCH
0200-02547	MTT-A2547	Ring Quartz Stepped
0200-02560	MTT-A2560	Ring Quartz 200-50N
0200-03574	MTT-A3574	Ring Quartz Stepped producer ETCH
0200-03629	MTT-A3629	Cover Ring 200mm
0200-06447	MTT-A6447	UPPER CAP INSULATOR ALUM SYS
0200-09002	MTT-A9002	WINDOW SLIT CVD CHAMBER
0200-09005	MTT-A9005	WINDOW QTZ
0200-09074	MTT-A09074	HEATER WINDOW
0200-09429	MTT-A9429	WINDOW COATED BWCVD
0200-09555	MTT-A9555	QUARTZ FOCUS RING
0200-09657	MTT-A9657	QUARTZ RECESSED WINDOW
0200-09782	MTT-A9782	Quartz Insulating Pipe
0200-09785	MTT-A9785	Quartz Cap
0200-09787	MTT-A9787	RING,FOCUS,8,209MM IDX 1.38 HIGH,FLATTED
0200-09911	MTT-A9911	Quartz Shadow Ring (Cover Quartz)
0200-10073	MTT-A0073	INSULATOR QTZ, 200MM
0200-10133	MTT-A0133	WINDOW, RECESSED ENDPOINT
0200-10151	MTT-A0151	200mm QUARTZ CENTURA MXP
0200-10169	MTT-A10169	EDGE RING
0200-10176	MTT-A0176	200mm QUARTZ RING
0200-10246	MTT-A0246	UNIT-INSERT, GAS DIS., 88 HOLES, QTZ

0200-10446	MTT-A1446	Si RING
0200-10448	MTT-A1448	SI COLLAR RING, SI
0200-30223	MTT-A0223	GAS DISTRIBUTION PLATE
0200-35292	MTT-A5292	Endpoint Window
0200-35293	MTT-A5293	Manometer(Qtz)
0200-35294	MTT-A5294	Qtz Lower Chamber Plate
0200-35801	MTT-A5801	Window Recessed Endpoint
0200-36689	MTT-A6689	QTZ SINGLE RING
0200-36696	MTT-A6696	QUARTZ RING
0200-36697	MTT-A6697	SILICON RING
0200-39324	MTT-A39324	CHAMBER INSERT RING
0200-39346	MTT-A9346	200mm QUARTZ RING, NOTCH
0240-20021	MTT-A0021	LIST, BASIC SHIELD PARTS
0240-23703	MTT-A3703	LIST, BASIC DURA TTN SHUT COMP
0240-25480	MTT-A5480	KIT REST BUTTON
0242-39230	MTT-A9230	KIT, TxZ, PROCESS CONSUMABLE
3420-90090	MTT-A0090	INSULATOR (SEE ALSO 0020-97557)
3630-01083	MTT-A1083	RETAINER RING, EXTERNAL D TYPE
3630-01091	MTT-A1091	RETAINER RING, EXTERNAL 3/4
3630-01092	MTT-A1092	RETAINER RING, INTERNAL 5/8

AMAT-300MM

AMAT-300MM
OEM P/N	MTT P/N	PARTS DESCRIPTION
0020-48972	MTT-A48972	BD SHOWER HEAD
0020-52120	MTT-A52120	BD BLOCKER PLATE

0020-70275	MTT-A70275	SILANE SHOWER HEAD (CESL)
0021-12790	MTT-A12790	SILANE BLOCKER PLATE
0041-25016	MTT-A25016	HARP SHOWER HEAD (Non Center Hole)
0041-13891	MTT-A13891	HARP SHOWER HEAD (Center Hole)
0021-47450	MTT-A47450	HARP BLOCKER PLATE
0040-95475	MTT-A95475	ELK SHOWER HEAD
0021-61344	MTT-A61344	ELK BLOCKER PLATE
0020-49785	MTT-A49785	APF(65) SHOWER HEAD
0020-48891	MTT-A48891	APF(65) BLOCKER PLATE
0021-42629	MTT-A42629	APF(45) SHOWER HEAD
0021-63185	MTT-A63185	APF(45) BLOCKER PLATE (ELK STD B/P)
0041-13896	MTT-A13896	LTUSG SHOWER HEAD
0021-52143	MTT-A52143	LTUSG BLOCKER PLATE
0021-32986	MTT-A32986	LTUSG SCREW
0040-95463	MTT-A95463	TEOS SHOWER HEAD
0020-44453	MTT-A44453	TEOS BLOCKER PLATE
0020-53698	MTT-A53698	DIFFUSION SHOWER HEAD (Anodized)
0021-14590	MTT-A14590	DIFFUSION SHOWER HEAD (No Anodized)
0021-14589	MTT-A14589	DIFFUSION BLOCKER PLATE
0041-13898	MTT-A13898	SA SHOWER HEAD
0020-62625	MTT-A62625	BLOK SHOWER HEAD

0021-37996	MTT-A37996	Tungsten Blocker Plate (Standard)
0020-94130	MTT-A94130	Tungsten Shower Head (CIP)
0020-94180	MTT-A94081	Tungsten Blocker Plate (CIP)
0021-27233	MTT-A27233	Mixing Tube with Anodized (2 mils Hard Ano)
0021-27233	MTT-A27233	Mixing Tube without Anodized
0020-51923	MTT-A51923	Shower Head
0040-08492	MTT-A08492	Shower Head
0040-87765	MTT-A87765	Shower Head
0020-47008	MTT-A47008	Blocker Plate
0020-70842	MTT-A70842	Blocker Plate
0020-94081	MTT-A94081	Blocker Plate
0200-01233	MTT-A01233	Insert Ring
0200-02160	MTT-A02160	EPD WINDOW

0200-02301	MTT-A02301	300MM SI COVER RING(POLY)
0200-02542	MTT-A02542	Q'TZ INSULATOR(PRO)


0200-03555	MTT-A03555	AMAT CT + INNER RING(L-Res)
0200-03559	MTT-A03559	AMAT CT+TOP RING(POLY)
0200-03574	MTT-A03574	QUARTZ RING(PRO)
0200-03576	MTT-A03576	(C2)SI TOP RING(PRO)
0200-03736	MTT-A03736	SIC INSERT RING(PRO)
0200-04220	MTT-A04220	OUTER RING
0200-04298	MTT-A04298	NOTCH LIFT PINS
0200-04317	MTT-A04317	BOTTOM RING
0200-04953	MTT-A04953	LIFT PINS SAPHIRE
0200-05032	MTT-A05032	INSERT RING NMS L-SHAPE 300MM
0200-05147	MTT-A05147	LIFT PINS SAPHIRE
3350-00048	-	INSERT QTZ GLASS SQUARE CORNER RAP
0200-03555SIC	-	EMAX CT+ SIC INSERT RING
3-A00357-01	-	QTZ SLEEVE
2-823155-01	-	SHAWER PLATE

AMAT翻修品/AMAT RE-FURBISHED

AMAT翻修品/AMAT-REFURBISHED
OEM P/N	MTT P/N	PARTS DESCRIPTION
0021-01421	-	DPS UPPER CHAMBER (MEC-04 COATING)
0021-01421	-	DPS UPPER CHAMBER (1411-ME COATING)