| TEL-200MM |
| OEM P/N |
MTT P/N |
PARTS DESCRIPTION |
| 1D10-204338-13 |
MTT-T4338-13 |
Y2O3 UPPER ELECTRODE |
| 1D10-204418-12 |
MTT-T4418-12 |
Y2O3 COVER BELLOW(Short) |
| 1D10-204419-12 |
MTT-T4419-12 |
Y2O3 COVER BELLOW(Long) |
| 1D10-315183-15 |
MTT-T5183-15 |
Y2O3 DEPO SHIELD |
| 1D10-315649-12 |
MTT-T5649-12 |
Y2O3 DEPO WINDOW |
| 1D10-102848-13 |
MTT-T2848-13 |
Y2O3 BAFFLE PLATE |
| 1D05-300353-11 |
MTT-T3353 |
QZ A8-1 RING |
| 1D05-300354-11 |
MTT-T3354 |
QZ A8 RING |
| 1D05-300188-12 |
MTT-T8812 |
RING INSULATOR A7 LA4-B (Q) DRM2 |
| 1D05-300190-12 |
MTT-T9012 |
RING INSULATOR A7 INNER QTZ |
| 1805-021885-12 |
MTT-T1885-12 |
PC SHIELD RING, QUARTZ |
| 1805-220008-11 |
MTT-T0008-11 |
WINDOW, VIEW PORT |
| 1805-220012-14 |
MTT-T0012-14 |
OTR FOCUS RING, QTZ |
| 1805-220098-11 |
MTT-T0098-11 |
RING,SHIELD,T7L5 |
| 1805-220135-12 |
MTT-T0135-12 |
EXT. OUTER RING(SCCM), QUARTZ |
| 1805-220135-23 |
MTT-T0135-23 |
Exhaust Outer Ring |
| 1805-220150-11 |
MTT-T0150-11 |
SHIELD RING(SCCM), QUARTZ |
| 1805-220150-12 |
MTT-T0150-12 |
QZ Shield Ring |
| 1805-220159-13 |
MTT-T0159-13 |
QZ RING |
| 1805-220177-22 |
MTT-T0177-22 |
Shield Ring |
| 1805-220177L12 |
MTT-T185-7L12 |
RING, SHIELD T5-280 QUARTZ SCCM (NO STEP) |
| 1805-310110-11 |
MTT-T0110-11 |
INNER COVER RING(SCCM), QUARTZ |
| 1805-320102-11 |
MTT-T0102-11 |
Q'TZ OUTER FOCUS RING(SCCM), QUARTZ |
| 1805-320102-12 |
MTT-T0102-12 |
QZ Cover Ring |
| 1805-320103-12 |
MTT-T0103-12 |
BASE RING COOLING(SCCM), QUARTZ |
| 1805-320104-11 |
MTT-T0104-11 |
RING HOLDER COOLING F/R(SCCM), QUARTZ |
| 1805-320109-11 |
MTT-T0109-11 |
OUTER COVER RING(SCCM), QUARTZ |
| 1805-320110-11 |
MTT-T185-1011 |
COVER RING INNER (SCCM-OX) |
| 1805-320110-21 |
MTT-T0110-21 |
RING, COVER INNER H6 235MM SCCM |
| 1805-320125-21 |
MTT-T0125-21 |
Cover Ring Inner |
| 1805-320126-21 |
MTT-T0126-21 |
Cover Ring Outer |
| 1805-320138-11 |
MTT-T0138-11 |
INNER SHIELD RING (SCCM), QUARTZ |
| 1805-320140-11 |
MTT-T0140-11 |
INNER COVER RING(SCCM-LLDX), QUARTZ |
| 1805-320141-11 |
MTT-T0141-11 |
OUTER COVER RING(SCCM-LLDX), QUARTZ |
| 1805-320142-11 |
MTT-T0142-11 |
BASE RING COOLING(SCCM- LLDX), QUARTZ |
| 1805-320145-13 |
MTT-T0145-13 |
EPO WINDOW |
| |
|
|
| 1810-121018-14 |
MTT-T1018-14 |
QUARTZ SHIELD RING |
| 1810-121923-11 |
MTT-VT1923-11 |
SCCM UPPER ELECTRODE, LLD TYPE |
| 1810-121988-11 |
MTT-T1988-11 |
ELECTRODE UPPER(75), SI |
| 1810-221048-13 |
MTT-T1048-13 |
SHIELD RING |
| 1810-221182-14 |
MTT-T1182-14 |
NEW FOCUS RING, QUARTZ |
| 1810-221209-12 |
MTT-T1209-12 |
PLATE, ELECTRODE CATHODE PLATE 120 |
| 1810-221329-12 |
MTT-T0329-12 |
SHIELD RING |
| 1810-221439-02 |
MTT-T0439-02 |
UPPER ELECTRODE, SILICON |
| 1810-221470-24 |
MTT-T0470-24 |
UPPER ELECTRODE, SILICON CRYSTAL |
| 1810-221470-25 |
MTT-T1470-25 |
CRYSTAL ELECTRODE |
| 1810-221471-24 |
MTT-T1471-24 |
CRYSTAL CATHODE(509 HOLE), SI |
| 1810-221471-25 |
MTT-T0471-25 |
CRYSTAL CATHODE(633 HOLE), SILICON |
| 1810-221527-13 |
MTT-T1527-13 |
BELL JAR (9.25) |
| 1810-221584-12 |
MTT-VT2584-12 |
COOLING PLATE |
| 1810-221616-11 |
MTT-T0616-11 |
ALUMINUM SHOWERHEAD |
| 1810-222433-11 |
MTT-T2433-11 |
QUARTZ INNER RING |
| 1810-222662-11 |
MTT-T0662-11 |
SHIELD RING, QUARTZ LOW SODIUM GE144 |
| 1810-223596-11 |
MTT-T3596-11 |
RING SHIELD T7 |
| 1810-224634-11 |
MTT-T4634-11 |
FOCUS RING 8" Nw-2 (8K-ESC) |
| 1810-224789-11 |
MTT-VT2789-11 |
SCCM ELECTRODE |
| 1810-225123-11 |
MTT-VT5123-11 |
SCCM FOCUS RING, LLD TYPE |
| 1810-323878-14 |
MTT-T0878-14 |
INNER FOCUS RING, SILICON CYRSTAL |
| 1810-323881-14 |
MTT-T3881-14 |
FOCUS INNER RING |
| 1810-324934-13 |
MTT-T0934-13 |
BELLOWS COVER |
| 1810-329156-11 |
MTT-VT3156-11 |
SCCM FOCUS RING |
| 1810-329523-11 |
MTT-T9523-11 |
INNER FOCUS RING, SI |
| 1810-424110-2 |
MTT-T4110-2 |
BAFFLE..A (8K) |
| 1810-428037-11 |
MTT-T0037-11 |
BUSHING, RING SHIELD |
| |
|
|
| 1810-428721-11 |
MTT-T0721-11 |
SCREW, BELLOWS |
| 1D05-300040-13 |
MTT-T0040-13 |
RING INSULATOR C, QUARTZ |
| 1D05-300052-12 |
MTT-T0052-12 |
RING INSULATOR A, QUARTZ |
| |
|
|
| 1D05-300052-13 |
MTT-T3052-13 |
RING INSULATOR A7 |
| 1D05-300053-14 |
MTT-T3053-14 |
QZ INSULATOR RING (HAA CHAMBER) |
| 1D05-300061-13 |
MTT-T0061-13 |
INSULATOR RING A7 |
| |
|
|
| 1D10-046499-11 |
MTT-T0499-11 |
WINDOW DEPO SAF 0.5(DRM2), QUARTZ |
| 1D10-090060-TM |
MTT-T0060-TM |
COVER BELLOW SHORT |
| 1D10-100327 |
MTT-T0327 |
BAFFLE PLATE |
| 1D10-100670-13 |
MTT-T0670-13 |
UPPER ELECTRODE |
| 1D10-100854-15 |
MTT-T0854-15 |
BAFFLE PLATE |
| 1D10-100907-12 |
MTT-T0907-12 |
BAFFLE PLATE |
| 1D10-101398-11 |
MTT-T1398-11 |
BAFFLE PLATE, E |
| 1D10-101475-11 |
MTT-T0475-11 |
BAFFLE PLATE |
| 1D10-201429-15 |
MTT-T0429-15 |
UPPER ELECTRODE |
| 1D10-201588-12 |
MTT-T0588-12 |
UPPER ELECTRODE (STANDARD WITH MONITOR) |
| 1D10-201595-15 |
MTT-T0595-15 |
DEPO SHIELD |
| 1D10-202177-12 |
MTT-T0177-12 |
UPPER ELECTRODE BUSH TYPE (VESPEL INSERT) |
| 1D10-202204-12 |
MTT-T0204-12 |
UPPER ELECTRODE (VESPEL INSERT+ MONITOR) |
| 1D10-202988-11 |
MTT-T0988-11 |
COVER BELLOW |
| 1D10-204619-11 |
MTT-T4619-11 |
COVER BELLOW |
| 1D10-300040-13 |
MTT-T1D0-4013 |
RING INSULATOR C |
| 1D10-300053-14 |
MTT-T0053-14 |
RING INSULATOR B2 (DRM2) |
| 1D10-302208-13 |
MTT-T2208-13 |
SI FOCUS RING |
| 1D10-302209-14 |
MTT-T0209-14 |
SILICON FOCUS RING |
| 1D10-303124-21 |
MTT-T0124-21 |
DEPO SHIELD |
| 1D10-309697-11 |
MTT-T9697-11 |
DEPO WINDOW |
| 1D10-309946-12 |
MTT-T9946-12 |
FOCUS RING |
| 1D10-310753-11 |
MTT-T3753-11 |
QZ A8 RING |
| 1D10-313469-12 |
MTT-T1D0-6912 |
FOCUS RING- Silicon |
| 1D10-313470-11 |
MTT-T3470-11 |
FOCUS RING- Silicon |
| 1D10-315183-15 |
MTT-T5183-150 |
Y2O3 DEPO SHIELD (Modified) |
| |
|
|
| 1D10-315469-12 |
MTT-T3469-12 |
SUPPORT RING SHIELD M-2 |
| |
|
|
| 1D10-406499-11 |
MTT-T6499-11 |
SAPPHIRE WINDOW |
| 2610-201918-12 |
MTT-T1918-12 |
OUTER SHIELD RING (SCCM), QUARTZ |
| 2L05-350004-11 |
MTT-T0004-11 |
RING(A) INSULATOR 380 |
| |
|
|
| |
|
|
| 1D10-090515-TM |
MTT-T0515-TM |
Ceramic Cover Bellow(short) |
| 1D10-202292-11 |
MTT-T2292-11 |
Ceramic Cover Bellow(long) |