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  • LAM-200MM
    LAM-200MM
    OEM P/N MTT P/N PARTS DESCRIPTION
    715-004042-001 MTT-L0421 ELECTRODE 8"
    715-011502-001 MTT-L0521 RING, UPPER COOLING
    715-011531-002 MTT-L0512 ELECTRODE ALUM. ANODIZED 
    715-011531-009 MTT-L1009 ELECTRODE  UPPER 8"(200MM), AL ANODIZED
    715-011531-014 MTT-L1014 ELECTRODE UPPER  8"(200MM) ANODIZED
    715-011559-262 MTT-L0522 CLAMP
    715-011584-001 MTT-L0584 GRAPHITE ELECTRODE, DFP 2
    715-011640-008 MTT-L0408 FOCUS RING, ANODIZED
    715-011673-006 MTT-L3006 ELECTRODE LOWER 8"
    715-011913-083 MTT-L0133 BAFFLE, LOWER
    715-018991-006 MTT-L1006 ELECTRODE UPPER 8" 5MIL HARD, .04 RAD. HOLES 
    715-018991-208 MTT-L18991-208 ELECTRODE UPPER 8"(200MM), 5052 AL ANODIZED
    715-021970-008 MTT-L0208 HOLDER WAFER 8"
    716-028454-012 MTT-L4542 QUARTZ DISK, REV B
    716-028454-512 MTT-L4512 DISK, QUARTZ
    715-030320-001 MTT-L0320 BSR INJECTION RING
    715-031752-208 MTT-L2208 ELECTRODE LOWER 8" (200MM), AL 2 MIL HARD ANODIZED 
    715-250586-001 MTT-L2561 BAFFLE PLT., BOTTOM 
    715-250717-001 MTT-L2571 BAFFLE PLATE , TOP 
    715-28608-161 MTT-L0161 Non-Contact Wafer Clamp
    715-31752-208 MTT-L3208 Electrode Lower 8"
    715-330000-090 MTT-L0090 GAS INJECTION RING
    715-330135-001 MTT-L3501 BSR INJECTION RING
    715-330889-002 MTT-L0889-002 Ground Ring
    715-330928-002 MTT-L3382 2 MIL HARD ANODIZE WITH SEALANT
    715-330981-001 MTT-L3311 2 MIL HARD ANODIZE WITH SEALANT
    715-330984-001 MTT-L8401 BSR INJECTION RING
    715-330987-001 MTT-L8701 BSR INJECTION RING
    716-001427-003 MTT-L0073 CERAMIC DISK
    716-001796-003 MTT-L0063 RING, FOC, DFC,200mm, GND PLT
         
         
    716-007136-002 MTT-L7136 UPPER RING, QUARTZ
    716-008645-001 MTT-L8645 Q'TZ COVER RING, QUARTZ
    716-011009-001 MTT-L0111 QUARTZ WINDOW 
    716-011427-001 MTT-L0471 DISK, QUARTZ
    716-011493-001 MTT-L4931 QUARTZ SPACER
    716-011505-001 MTT-L5051 DISK DIFFUSER
    716-011533-001 MTT-L5331 WINDOW QUARTZ
    716-011563-152 MTT-L5632 PLATE, WAFER CLAMP
    716-011563-162 MTT-L5662 PLATE, WAFER CLAMP
         
    716-011563-262 MTT-L5262 PLATE, WAFER CLAMP
    716-011563-264 MTT-L5264 PLATE, WAFER CLAMP
    716-011563-268 MTT-L3268 DOME WAFER CLAMP 
    716-011564-001 MTT-L4001 UPPER ELECTRODE GRAPHITE DFP-2
    716-011564-003 MTT-L4003 CATHODE 6" GRAPHITE SFG 2
         
         
    716-011624-001 MTT-L6241 RING, INSULATOR
         
    716-011651-005 MTT-L6515 RING EDGE 5"
    716-011651-006 MTT-L6516 EDGE RING, WAFER CLAMP
    716-011651-008 MTT-L6518 RING EDGE WAFER CLAMP 8"
    716-011764-181 MTT-L7641 PLATE, W/C 8".035 DOME
    716-011775-168 MTT-L7768 WAFER CLAMP
    716-011830-008 MTT-L8308 WAFER CLAMP FOCUS RING 8"
    716-011922-001 MTT-L9221 WAFER CLAMP, RING
         
         
    716-013423-007 MTT-3L3007 LINER,QUARTZ, LID OPNG,2300 M
    716-015595-001 MTT-L9551 RING, FOC, STEPPED, DFC200MM
    716-015595-002 MTT-L0152 RING, FOC, STEPPED, DFC200MM
    716-015597-001 MTT-L0159 RING, CVR, WAP, QTZ, DFC200MM
    716-016394-001 MTT-L6394 CONFINEMENT RING ONE PIECE, QUARTZ
    716-016763-001 MTT-L6763 Q'TZ EDGE RING, QUARTZ
    716-016830-002 MTT-L6830 WAP RING, QUARTZ
    716-016831-002 MTT-L0163 RING WAP, QTZ, GENERIC, 200MM, 230
    716-017601-204 MTT-L0174 BASE FCS R, SHLD, 200MM, 2300-.33
    716-018527-426 MTT-L7426 WAFER CLAMP CERAMIC 8"
    716-018993-001 MTT-L9931 RING EDGE
         
         
    716-021323-001 MTT-L3231 FUNNEL QUARTZ MODULE
         
    716-021323-003 MTT-L3233 FUNNEL QUARTZ MODULE
    716-021773-002 MTT-L7732 GASKET ISO CHAMBER
    716-026652-002 MTT-3L52002 QUARTZ BOTTOM RING HPQ - NP
    716-028028-004 MTT-L0284 ELECTRODE INSULATOR, LOW PRESSURE
         
    716-028249-064 MTT-L2494 FOCUS RING
    716-028281-001 MTT-L2881 CONFINEMENT RING
    716-028414-016 MTT-L4146 RING, FOCUS
    716-028414-018 MTT-L4148 RING FOCUS 8"
    716-028447-002 MTT-L4472 CERAMIC DISK
    716-028454-012 MTT-L4542 QUARTZ DISK, REV B
    716-028547-001 MTT-L5471 PLATE, WAFER CLAMP  
    716-028668-053 MTT-L8035 WAFER CLAMP, CERAMIC
    716-028668-252 MTT-L6625 PLT TP WFR CLAMP DMD SHADOW
         
    716-028668-262 MTT-L6682 PLATE, WAFER CLAMP DOMED SHADOW
    716-028668-268 MTT-L6688 SHADOW CLAMP, JEIDA, TOP ASSY
    716-028668-281 MTT-L6621 PLATE, LOWER WAFER CLAMP 8" SHADOW
    716-028668-288 MTT-L6628 PLATE TOP WAFER
    716-028721-261 MTT-L8261 PLATE WAFER CLAMP DOMED
    716-028721-262 MTT-L8712 BOTTOM WAFER CLAMP
    716-028721-268 MTT-L1268 SHADOW CLAMP, JEIDA,  BOTTOM ASSY
         
    716-028721-288 MTT-L7228 BOTTOM WAFER CLAMP 8" MAJOR FLAT
    716-028722-161 MTT-L7221 PLATE, BOTTOM WAFER CLAMP
         
    716-031052-001 MTT-L3121 QUARTZ WINDOW HEATED
    716-031257-209 MTT-L7209 RING, TOP EDGE, QTZ - NP
    716-031453-001 MTT-L4531 RING, FILLER, LOWER CLAMP
         
    716-080281-001 MTT-L8811 QUARTZ RING (REV E1)
    716-140068-001 MTT-L4681 CERAMIC FOCUS RING
         
    716-140124-100 MTT-L1404 AL BAFFLE
         
    716-140126-101 MTT-L1406 AL BAFFLE
    716-140139-211 MTT-L9211 SI HOT EDGE RING
    716-140139-211 MTT-L4391 Ring, Hot Edge, HI Wall, ESC 8"
    716-140139-213 MTT-L4393 RING, HOT EDGE, HI WALL ESC 8"
    716-140141-261 MTT-L4411 SILICON RING
    716-140163-001 MTT-L4631 HOT EDGE RING
    716-140163-261B MTT-L4661-B RING, HOT EDGE 15∘ ESC STD 6
    716-140236-001 MTT-L4361 QUARTZ CLAMP
    716-140236-061 MTT-L6061 QUARTZ CLAMP
    716-140236-062 MTT-L4062 QUARTZ CLAMP
    716-140239-001 MTT-L0239 RING CONFINEMENT, QUARTZ
    716-140427-001 MTT-L4071 RING, HOT EDGE 15∘ NCH ESC STD 6
    716-140432-001 MTT-L1421 RING UPR KEYED, QUARTZ
    716-140432-002 MTT-L1422 Ring, Upper, Quartz
    716-140432-061 MTT-L1361 QUARTZ RETAINING RING
    716-140432-062 MTT-L1362 QUARTZ RETAINING RING
    716-140469-002 MTT-L1492 4RING CPLG HP QTZ ESL 8'' STD
    716-249391-001 MTT-L2911 FOCUS RING, USC 200MM
    716-250404-001 MTT-L2041 FOCUS RING QUARTZ
    716-330004-181 MTT-L3041 RING, FOCUS, HI, COND. ESC 8"
    716-330045-004 MTT-L3454 FOCUS RING 8"
    716-330061-006 MTT-L3616 PLATE, SHOWERHEAD
    716-330068-001 MTT-L3681 GAS RING COVER
    716-330121-001 MTT-L2101 WDO, RF SHDPD CER, FXD GAPN
    716-330122-002 MTT-L2002 PL, TOP,CER F/G
    716-330135-001 MTT-L3351 GAS RING 
    716-330162-002 MTT-L3622 RING FILTER
    716-330167-152 MTT-L3672 RING, CLAMP
    716-330167-168 MTT-L3678 RING, CLAMP
    716-330167-252 MTT-L7252 CLAMP
    716-330167-261 MTT-L3621 PLATE WAFER CLAMP
    716-330167-281 MTT-L3181 RING, CLAMP
    716-330190-081 MTT-L3901 RING, FOCUS, 8" ESC 
    716-330355-001 MTT-L3551 QUARTZ WINDOW 
    716-330564-061 MTT-L3641 FOCUS RING 
         
    716-330892-007 MTT-L3027 GAS DISTRIBUTION PLATE CERAMIC 21 HOLES
    716-330915-003 MTT-L5003 SLV,INSUL,ESC-LOW
    716-331088-001 MTT-L8801 R, EDGE, 8'' ES, NCH, TOP QTZ
    716-331088-002 MTT-L8802 R, EDGE, 8'' ES, NCH, TOP QTZ RGHED
    716-331088-004 MTT-L8804 R, EDGE, 8 IN., ES, NCH, TOP, QTZ, EX
    716-331118-181 MTT-L1818 RING FOC INR, 8'' ESC, TQZ 
    716-331128-001 MTT-L8001 WINDOW SAPPHIRE
    716-331142-001 MTT-L1142 RING, EDGE, TOP WIDE
    716-331157-013 MTT-L7013 QTZ DISK TOP GAS
    716-331157-014 MTT-L1157 DISC TOP GAS, QUARTZ
         
    716-402452-001 MTT-L4021 R, CPLG, QTZ, ESC, JEIDA, HP 8''
    716-441044-007 MTT-L1044 Q'TZ PLASMA DISTRIBUTE STP, QUARTZ
    716-443083-004 MTT-L3083 Q'TZ RING CONFINEMENT UPPER, QUARTZ
    716-443084-003 MTT-L3084 Q'TZ RING CONFINEMENT LOWER, QUARTZ
    716-443086-001 MTT-L0861 HOT EDGE RING
    716-443086-308 MTT-L0863 HOT EDGE RING, SI
    716-443086-401 MTT-L8461 HOT EDGE RING
    716-443086-401-A MTT-VL8461 HOT EDGE RING
    716-443086-408 MTT-L6408 HOT EDGE RING, SI
    716-443090-010 MTT-L4490 R, QTZ, UPR, HP
    716-443179-102 MTT-L9102 RING,EDGE,BASE
    716-443189-002 MTT-L1892 QUARTZ COVER RING
    716-443230-002 MTT-L4432 RING, CONFINEMENT, HP
    716-443234-002 MTT-L2342  FOCUS RING, QUARTZ
    716-460417-001 MTT-L4671 INNER CERAMIC LINER
    716-460785-002 MTT-L4852 PLATE, GAS DIST 10 HOLE
    716-460785-015 MTT-L7850-15 LAM 91 G.D.P.
    716-460916-001 MTT-L4161 RING CHAMBER
    716-460916-001  REV B MTT-L16001 Inner Cover / Composite Focus Ring Inner
    716-460916-002 MTT-L4162 RING, COMPOSITE
    716-460916-002  REV.C MTT-L16002 Inner Cover / Composite Focus Ring Inner
    716-461412-001 MTT-L4602 BASE, COV, FOC R,8'' JEIDA
    716-800951-005 MTT-L1005 BASE, FCS R, SHLD, 200MM
    716-800951-300 MTT-L1300 BASE,FCS RNG,SHLD,200&300MM
    716-801306-008 MTT-L6008 WINDOW GAS INJECTION QTZ  - NP
    716-802779-107 MTT-L9107 INJECTOR HPQ QUARTZ - NP
    716-802947-001 MTT-L8271 FOC RING,BASE,200MM,QUARTZ
    839-011906-001 MTT-L6001 SI ELECTRODE
    853-210621-306 REV A MTT-L2306-REV A AL RING
    885-425420-001 MTT-L4201 QUARTZ CLAMP
  • LAM-300MM
    LAM-300MM
    OEM P/N MTT P/N PARTS DESCRIPTION
    716-012639-024 MTT-3L9024 HPQ QUARTZ GAS INJECTOR
    716-012640-011 MTT-3L0011 HPQ QUARTZ WINDOW
    716-013344-001 MTT-3L4001 GROUND COVER RING
         
    716-013402-003 MTT-3L2003 HOT EDGE RING COVER
         
         
    716-014843-350 MTT-3L3350 CONFINEMENT RING
    716-017112-300 MTT-3L2300 TWIST WAP RING
    716-017112-330 MTT-3L2330 Ring WAP Twist Top, 17in, DFC300mm
    716-017112-522 MTT-3L2522 WAP RING 
    716-018468-092 MTT-3L8092 GROUND COVER RING(H/T)
    839-021113-402 MTT-3L3402 FLEX INNER ELECTRODE (ONE BODY)
    716-022030-004 MTT-3L0004 QUARTZ STEPPED PIN DC ,BIAS
    716-023013-004 MTT-3L3004 Ring, Hot Edge, Si, DFC 300mm
    716-023013-015-A MTT-3L3015A HOT EDGE RING
    716-023013-015-C MTT-3L3015C HOT EDGE RING
    716-023013-015-G MTT-3L3015G HOT EDGE RING
    716-023013-027 MTT-3L3027 HOT EDGE RING
    716-026652-002 MTT-3L2002 HPQ QTZ EDGE RING BOT(LAM2301 KIYO)
    716-026652-911 MTT-3L2911 HPQ BOTTOM EDGE RING(KIYO 3X)
    716-027740-001 MTT-3L0001 QTZ WINDOW OES 2300KIYO
         
    716-031257-309 MTT-3L7309 HPQ QTZ EDGE RING TOP(LAM2300 KIYO)
         
    716-040738-427 MTT-3L8427 HOT EDGE RING
    716-040738-428 MTT-3L8428 HOT EDGE RING
    716-040738-471 MTT-3L8471 SI HOT EDGE RING
         
         
    716-044157-031 MTT-3L7031 QUARTZ COVER RING(SLOT)
    716-044668-435 MTT-3L8435 Ring, Hot Edge, 4XX ESC, w/o Flat 300mm, SS
    716-045268-124 MTT-3L8124 QUARTZ COVER RING(SLOT)
    716-058179-007 MTT-3L9007 QUARTZ COVER RING
    716-069688-005 MTT-3L8005 TALON INNER ELECTRODE
    716-077262-004 MTT-3L2004 HPQ TOP EDGE RING(KIYO 3X)
         
    716-331142-305 MTT-3L2305 HPQ QUARTZ EDGE RING
    716-800951-311 MTT-3L1311 HPQ BASE FOCUS RING
    839-044157-031 - FLEX45 INNER ELECTRODE (ONE BODY)
         
         
         
         
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