| TEGAL-200MM |
| OEM P/N |
MTT P/N |
PARTS DESCRIPTION |
| 33-337-001 |
MTT-T0371 |
INNER BELLOWS |
| 33-338-001 |
MTT-T0381 |
BELLOWS OUTER |
| 33-349-004 |
MTT-T0494 |
ELECTRODE, CONDEHEAD UPPER |
| 37-221-001 |
MTT-T0211 |
ELECTRODE UPPER (CONEHEAD) 6061 AL, 2 MIL HARD ANODIZED |
| 37-221-003 |
MTT-T0213 |
ELECTRODE UPPER (CONEHEAD) 6061 AL, 2 MIL HARD ANODIZED |
| 39-249-004 |
MTT-T0904 |
CONEHEAD ELECTRODE, 2 MIL HARD ANODIZED, COIL ON BACK |
| 39-292-003 |
MTT-T0923 |
UPPER ELECTRODE |
| 39-306-001 |
MTT-T0601 |
UPPER ELECTRODE 10 HOLE |
| 39-344-002 |
MTT-T3402 |
Electrode , Upper ,901E |
| 39-424-001 |
MTT-T0241 |
ELECTRODE LOWER 5" |
| 39-676-001 |
MTT-T0761 |
ELECTRODE, UPPER WAFER JACKET |
| 39-680-003 |
MTT-T0803 |
ELECTRODE CONEHEAD VENTED, NON-ANODIZE |
| 39-700-007 |
MTT-T0707 |
ELECTRODE, HEATED UPPER |
| 39-709-002 |
MTT-T0792 |
ELECTRODE, LOWER 5" |
| 39-733-004 |
MTT-T3004 |
LOWER ELECTRODE |
| 39-733-007 |
MTT-T3007 |
Electrode Upper 901E, 6inch |
| 39-735-003 |
MTT-T0753 |
ELECTRODE, LOWER 5" |
| 39-735-004 |
MTT-T5004 |
LOWER ELECTRODE |
| 39-735-007 |
MTT-T0757 |
ELECTRODE, LOWER 5" |
| 39-735-008 |
MTT-T0758 |
ELECTRODE, LOWER ANODIZED 6" |
| 39-741-004 |
MTT-T0744 |
ELECTRODE, LOWER 6" |
| 39-741-009 |
MTT-T1009 |
ELECTRODE LOWER 6" |
| 39-741-010 |
MTT-T0710 |
ELECTRODE, LOWER 5" |
| 39-741-011 |
MTT-T0711 |
LOWER ELECTRODE 4" |
| 39-741-026 |
MTT-T5026 |
LOWER ELECTRODE |
| 39-754-010 |
MTT-T0541 |
ELECTRODE, RAD.COMP.6" |
| 39-832-004 |
MTT-T0324 |
ELECTRODE, TEMP. CONT. ANODIZED |
| 39-927-007 |
MTT-T7007 |
ELECTRODE LOWER 5" |
| 39-927-008 |
MTT-T7008 |
ELECTRODE LOWER 6" |
| 40-112-001 |
MTT-T0121 |
RING, CERAMIC CHAMBER |
| 40-133-001 |
MTT-T0131 |
WINDOW, SAPPHIRE ROD |
| 40-136-001 |
MTT-T0161 |
INSULATOR CRADLE 100MM |
| 40-140-001 |
MTT-T0101 |
RING, CERAMIC INSULATOR |
| 40-159-001 |
MTT-T0191 |
ROD, SAPHIRE |
| 40-159-002 |
MTT-T0192 |
ROD, SAPHIRE |
| 40-244-002 |
MTT-T0242 |
INSULATOR |
| 40-244-003 |
MTT-T0243 |
INSULATOR |
| 40-249-002 |
MTT-T0292 |
ELECTRODE, LOWER DISC 5" |
| 40-249-003 |
MTT-T0293 |
ELECTRODE, CERAMIC LOWER 6" |
| 40-260-001 |
MTT-T0201 |
WINDOW SAPPHIRE |
| 40-261-002 |
MTT-T0212 |
INSULATOR PRO |
| 40-275-001 |
MTT-T0251 |
UPPER INSULATOR |
| 40-276-001 |
MTT-T0261 |
LOWER INSULATOR |
| 40-279-001 |
MTT-T0291 |
SHIELD, DIAPHRAGM |
| 40-284-005 |
MTT-T0245 |
RING, QUARTZ |
| 40-289-002 |
MTT-T0282 |
ELECTRODE, LOWER MACOR 5" |
| 40-295-001 |
MTT-T0951 |
ELECTRODE, RING 5" |
| 40-295-003 |
MTT-T0253 |
FOCUS RING |
| 40-304-001 |
MTT-T0341 |
ELECTRODE, INSULATOR LOWER |
| 40-306-002 |
MTT-T0362 |
RING CERAMIC LOWER ELECTRODE 6" |
| 40-395-001 |
MTT-T0351 |
RING, INSULATOR 6'' |
| 40-395-002 |
MTT-T0352 |
RING, PROCESS 5" |
| 40-395-003 |
MTT-T0353 |
RING, CERAMIC RAISED ELECTRODE 5" |
| 40-516-006 |
MTT-T0566 |
RING, MACOR 5" |
| 40-516-007 |
MTT-T0567 |
RING, FLAT 6" CERAMIC |
| 40-526-003 |
MTT-T0563 |
CLAMP 6" WTC |
| 40-527-003 |
MTT-T0573 |
RETAINER 6" WTC |
| 41-215-001 |
MTT-T2151 |
GROUND RING RETAINER |
| 46-453-002 |
MTT-T0402 |
TOP PLATE SEAL |